Semiconductor processing

Cross section of semiconductor fabrication layers

Cross section of Dual Damascene (DD) interconnect system in a modern IC.  DB: diffusion barrier, ES: Etch stop layer, ILD Inner layer Dielectric.

 

Work of Nabil Mistkawi


 Chemical Cleaning Solution

A) AFM of copper surface before cleaning. B) AFM of copper surface after cleaning.

 

Atomic Force Microscopy of Copper surface before and after immersion in cleaning solution.

Work of graduate student Nabil Mistkawi 


 Selective Ti Etch Formulation

Ternary diagram of an etch solution

 

Work of graduate student Nabil Mistkawi