News

New Method for Visualizing Heavy Metal Grains
Author: Center for Electron Microscopy and Nanofabrication
Posted: November 19, 2014

Special STEM Images clearly showing Poly Si and W Grains. Cross-section specimen prepared with Strata 237 Dual Beam FIB and Images taken with TECNAI F20 TEM by Tony Chen.

 

Special STEM Images clearly showing the tungsten contact grains. Planview specimen prepared with Strata 237 Dual Beam FIB and Images taken with TECNAI F20 TEM by Tony Chen

Imaging heterogeneous junctions with significant atomic weight difference requires thin and uniform specimens without deformation and damage. Successful sample preparation is highly dependent on the skills of the analyst. 

CEMN has developed a special STEM technique to visualize heavy metal grains on thick specimens utilizing standard sample preparation techniques. Using standard sample techniques increases success rate of the analysis while reducing costs.