Zeiss Sigma VP FEG SEM
A variable pressure field emission SEM equipped with Oxford EDS/WDS detectors and E-beam lithography system. 1.3-nm imaging resolution is achievable at 20kV. The microscope is ideal for organic and inorganic materials, geology, biological samples with a capability of elemental composition analysis and comprehensive pattern generation.
Key features
- HT: 100V~30kV
- Resolution: 1.3nm
- Vacuum: Low / High vacuum
- Magnification: 30x~1,000,000x
- Tilt: -10° to +75°
- Rotation: 0 to 360 degree
Attachment
- Oxford EDX/WDX detector
- E-Beam lithography system
Application
- SE/BSE imaging
- EDX/WDX composition analysis
- E-beam lithography
