Starting Resources and Learning Materials
The PSU library has a hard copy and various digital editions of Microchip fabrication: a practical guide to semiconductor processing by Peter Zant. This is an excellent starting resource for someone new to lithography or cleanrooms.
Brief overview of contamination control and why having a cleanroom is important. Images taken from Matt Ramstorps Introduction to Contamination Control and Cleanroom Technology 2nd edition 2000
The PNNA cleanroom uses i-line photoresists. Our most widely used photoresist is SPR 220-3. However other i-line resists are available.