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Starting Resources and Learning Materials

The PSU library has a hard copy and various digital editions of Microchip fabrication: a practical guide to semiconductor processing by Peter Zant. This is an excellent starting resource for someone new to lithography or cleanrooms.

Brief overview of contamination control and why having a cleanroom is important. Images taken from Matt Ramstorps Introduction to Contamination Control and Cleanroom Technology 2nd edition 2000

Partial development trick for achieving better results with SPR220

The PNNA cleanroom uses i-line photoresists. Our most widely used photoresist is SPR 220-3. However other i-line resists are available.