The Department of Mechanical and Materials Engineering (MME) at PSU's Maseeh College of Engineering and Computer Science presents as part of the MME Seminar Series, Low Numerical Aperture MEMS Manufacturing.
Title: "Low Numerical Aperture MEMS Manufacturing"
Speaker: Larry Melvin, Synopsis, Inc.
Date: May 26, 2006
Time: 3:00-4:00 p.m.
Location: Room 102, Engineering Building, 1930 SW Fourth Avenue, Portland, Oregon 97201 (map)
The MEMS field consists of many techniques to create micron and sub-micron features on devices. One of the more significant applications of MEMS is in the area of bio-MEMS where patient specific devices can be created to replace failing body components. However, to date, all of these MEMS manufacturing techniques are too expensive to be used, except in the case of mass manufacturing which is generally not possible in bio-MEMS type applications. The LIGA MEMS process lends itself to these types of applications, but it is cost prohibitive for custom components. One of the more significant costs in the construction of these devices using LIGA is the illumination source, which is a synchrotron. A synchrotron is an x-ray source that costs on the order of $20 million. However, advances in LIGA technology have arrived that allow devices to be created using less expensive illumination sources, on the order of $1 million. This presentation will discuss a methodology that can be used to reduce this cost by at least a further factor of 10, helping to bring custom MEMS manufacturing into reality.
Larry Melvin is currently a research manager at Synopsys developing optical techniques to improve the manufacturability of deep submicron semiconductor devices. He has significant experience in the areas of photolithography, x-ray lithography, and LIGA MEMS. He is currently working as a part-time faculty member with PSU on MEMS applications in the area of fluid dynamics.