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FEI Sirion XL30 FEG SEM

A field emission high resolution SEM equipped with Oxford EDS. The microscope can be operated both at low accelerating voltage (200V) and high accelerating voltage (30kV). The immersion lens technique pushes the resolution to nm order while complete computer control guarantees user friendly operation.

 

Key Features

  • HT: 500V~30kV
  • Resolution: 1.5nm
  • Vacuum: High Vacuum
  • Magnification: 36x~800kx
  • Tilt: -15° to +75°
  • Rotation: 0 to 360 degree

Attachment

  • INCA EDX detector

Application

  • SE imaging and EDX
  • EDX composition analysis

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